PECVD is one of the key process of PEM technique which is widely used in the semiconductor and solar panel manufacturing processes. As the carrier of the silicon panel, graphite is the optimal material thanks to its features as higher purity, erosion resistance, super bending strength and good conductivity.
SHF is to provide our customers with higher quality tube PECVD graphite boat, components and after sale services with competitive price.
SHF has the professional team to offer technical supports and help our clients tackle the various technical problems relevant to graphite boat.
SHF has the expertise to customize the graphite boat according to client’s specific demands such as nonstandard technique point, special graphite partition block and pottery parts.